| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a0f26a9c2efad3ae086a108f3c04b57d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0257 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00158
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R31-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30608 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00 |
| filingDate |
1997-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2ca29033966287de7165e80b97f0686
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34f223bf7c7582f71432926668151631 |
| publicationDate |
2000-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100265876-B1 |
| titleOfInvention |
Method of making high sensitivity micro-machined pressure sensors and acoustic transducers |
| abstract |
A method of manufacturing a high sensitivity and small size input sensor or acoustic transducer. A thin sensing diaphragm is formed by forming a highly doped single crystal silicon layer on the substrate using chemical vapor deposition. The diaphragm is coupled to a pressure sensor or acoustic transducer that detects a change in pressure by varying the capacity of a capacitor including the diaphragm as a movable member. Thin diaphragms can form high sensitivity devices that can be manufactured in smaller sizes than sensors or transducers with thick diaphragms. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9462388-B2 |
| priorityDate |
1996-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |