http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100246105-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 |
| filingDate | 1993-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2000-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f9bdbe7b31d4470a7dbf6381b8f1ff5 |
| publicationDate | 2000-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100246105-B1 |
| titleOfInvention | Semiconductor Wafer Processing Equipment |
| abstract | A CVD film deposition apparatus on a semiconductor wafer includes a reaction vessel. The reaction vessel is provided with a rotating table on which a plurality of wafers can be transferred. In the reaction vessel, the partition is divided into six compartments by partitions. The partition chamber includes a wafer exchange chamber for lowering and unloading a wafer, a first process chamber for forming a silicon film on the wafer, a second process chamber for oxidizing the silicon film to a silicon oxide film, a wafer exchange chamber, first and second It becomes three exhaust chambers provided between processing chambers. The wafer is processed with the table rotated continuously. As the table rotates, the wafers are processed in the first and second processing chambers, and unwanted products generated therefrom are sequentially removed from the exhaust chamber. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101358641-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101318940-B1 |
| priorityDate | 1992-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.