| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_526cb931f1382d6e016ee651d55e1365
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cbffa3b81b3b862dc7220b5648f5f745 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F216-06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F261-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F216-1416
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F216-38 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F216-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F216-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F16-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F261-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1996-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1999-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7900033e1c51bdf365a02541a4b27c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_711a4959069eb2eb4d752c8f545830f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc561a99a89a4cfb372dfd072fcd61dc |
| publicationDate |
1999-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100220951-B1 |
| titleOfInvention |
Vinyl 4-tetrahydropyranyloxybenzal-vinyl 4-hydroxybenzal-vinyl tetrahydropyranylether-vinyl acetate copolymer, vinyl 4-tetrahydropyranyloxybenzal-vinyl tetrahydropyranylether-vinyl acetate copolymer And their production method |
| abstract |
The present invention relates to a novel photoresist material that can be used in the far ultraviolet region as vinyl 4-tetrahydropyranyloxybenzal-vinyl 4-hydroxybenzal-vinyl tetrahydropyranylether-vinyl acetate copolymer, vinyl 4-tetrahydropyra Nyloxybenzal-vinyl tetrahydropyranylether-vinyl acetate copolymer and its manufacturing method are provided. The copolymer of the present invention exhibited very low absorbance in the far-ultraviolet region, showing excellent transparency, and improved dry etching resistance by the acetal structure of the main chain and the acetal structure of the substituent. |
| priorityDate |
1996-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |