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filingDate 1997-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1999-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1999-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100219840-B1
titleOfInvention Organic Aluminum Compound Precursor and Manufacturing Method of High Purity Alumina Membrane Using the Same
abstract The present invention relates to an organoaluminum compound precursor and (beta-ketoester)-(alkoxide) -aluminum compound as an organoaluminum compound precursor for alumina deposition, which is present in the liquid phase and liquid phase and is easy to handle and free of carbon contamination due to thermal decomposition of ligands during the deposition process. It provides a method for producing a high purity alumina separation membrane having a fine pore structure using a chemical vapor deposition method.
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