http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100213202-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32183 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 1996-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1999-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_114021345ba3de3aa2fd2333768cf423 |
| publicationDate | 1999-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100213202-B1 |
| titleOfInvention | Plasma Forming Device and Etching Method of Semiconductor Device Using the Same |
| abstract | The present invention relates to a plasma forming method and an etching method of a semiconductor device using the same. In the present invention, a high frequency generator is applied to the etching chamber through a coil antenna wound around an outer wall of the etching chamber in an etching process for manufacturing a semiconductor device. The helicon wave plasma forming apparatus which supplies the high frequency current supplied and the DC current supplied from a direct current supply means together is used. According to the present invention, the configuration of the helicon wave plasma forming apparatus can be made simpler by omitting the electromagnet from the structure of the helicon and the plasma forming apparatus. |
| priorityDate | 1996-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224 |
Total number of triples: 20.