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publicationDate 1999-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100205556-B1
titleOfInvention High Density Itio Sintered Itio Target and Manufacturing Method Thereof
abstract High density ITO sintered compact, indium oxide powder, tin oxide powder used as a raw material, and its manufacturing method.
priorityDate 1992-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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