| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B57-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
1995-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1999-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4901c9c0e18eb8f9f0c4805be4e7da48 |
| publicationDate |
1999-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-0174106-B1 |
| titleOfInvention |
Method of Forming Abrasive Particles |
| abstract |
The present invention provides a novel method of supplying a polishing liquid to a surface of a polishing pad on which a surface of a film is polished, wherein a solution containing a flocculant and a slurry in which fine abrasive grains are already dispersed is separately supplied to the surface of the polishing pad so that the slurry Provided is a method of mixing with a solution to form agglomerated particles in which agglomeration of the fine abrasive particles is used for polishing. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20000019872-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100850085-B1 |
| priorityDate |
1994-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |