http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-0169271-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06783 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1994-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1999-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03cd372c5fb26c7aef41b9248121dfef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91600a4162e2bfb9f0530d09cee8ac5c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58cbb773b7b4b1596cf394abd01c6156 |
| publicationDate | 1999-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-0169271-B1 |
| titleOfInvention | Device for evaluating semiconductor device characteristics and method for evaluating semiconductor device characteristics using the device |
| abstract | The present invention simply and stably obtains electrical contact between the pad and the measuring needle in the evaluation of the characteristics of the semiconductor device.n n n Each measuring needle (1-2) has a metal needle-like structure and is disposed in correspondence with each electrode position of the LSI to be the object to be measured, and at the distal end thereof, a metal melt mainly composed of gallium is used. Maintained. Each measuring needle 1-2 is supported by the support substrate 1-1. Each measuring needle 1-2 is connected to a measuring device 1-5 for evaluating the characteristics of the LSI via the wiring 1-4. |
| priorityDate | 1993-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.