| abstract |
The present invention relates to a coating film which can sufficiently improve the wear resistance of a cutting tool or a wear resistant tool and exhibits excellent quality as a wear resistant film or a protective film for electric parts, electronic parts, sliding parts or mechanical parts. Such coatings comprise at least one nitride or carbonitride of at least one element selected from the group consisting of elements of groups 1Va, Va and VIa of the periodic table, Al and B, and crystals other than cubic crystal structures at standard temperature, standard pressure and equilibrium. It consists of at least one compound having a structure and mainly covalent, wherein the at least one nitride or carbon nitride has a cubic crystal structure and a metal bond, the at least one nitride or carbonitride and the at least one compound The layers are alternately stacked in the form of layers, and the layer thicknesses of the at least one nitride or carbon nitride and the at least one compound are each 0.2 to 50 nm, and the laminate has a cubic crystal X-ray diffraction pattern as a whole. |