| abstract |
Electrolyzed water, including an anode number and a cathode number, having oxidative or reductive properties and having an acidic or alkaline nature, is obtained by electrolyzing an aqueous solution prepared by adding a small amount of electrolyte, and includes reconditioning, etching and rinsing a semiconductor wafer. Is applied to the wet process. The effect of the electrolyzed water significantly reduces the amount of conventional acidic or alkaline chemicals. |