http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-0143302-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_696ca0ae93d5cf5a686273601361781f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D15-363 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D15-362 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B15-0135 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B15-013 |
| filingDate | 1995-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1998-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7743d635f31b0a0d85c9684b9103aaf7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f5cb3cf3870082f380082d054251e26 |
| publicationDate | 1998-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-0143302-B1 |
| titleOfInvention | Method of Purifying Hydrogen Peroxide |
| abstract | The present invention provides a method for preparing a fixed hydrogen peroxide solution that can be used in a semiconductor process from a prepared hydrogen peroxide solution containing a metal-based and inorganic impurity, which comprises (a) adding a specific amount of an acid such as sulfuric acid and nitric acid to prepare a preparation solution. The acidified and (b) acidified preparation solution was filled with a mixture of hydrogen-type strong acid cation exchange resins or a specific volume ratio of strong base anion exchange resins of hydroxy, carbonate or hydrogen carbonate type. Passing through the column to remove impurities by ion exchange. The efficiency of this purification process is achieved by leaving the acidified preparation solution for a period of time, e.g., at least 6 hours prior to the ion exchange treatment of step (b). It can be further improved. |
| priorityDate | 1994-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.