http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2020203563-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-02 |
| filingDate | 2020-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2020203563-A1 |
| titleOfInvention | Etching solution for liquid crystal polymer and etching method for liquid crystal polymer |
| abstract | An object of the present invention is to provide an etching solution for a liquid crystal polymer and an etching method for the liquid crystal polymer, in which the shape of the liquid crystal polymer after etching is close to the design shape and etching can be performed with high in-plane uniformity. It contains 5 to 45% by mass of alkali metal hydroxide as the first component and 5 to 80% by mass of the alkanolamine compound having a molecular weight of 70 or more as the second component, and preferably further 1 to 60% by mass. An etching solution for a liquid crystal polymer and a liquid crystal polymer using the etching solution, which contains a third component by mass% and the third component contains at least one selected from an alcohol compound and a carboxylic acid compound. Etching method. |
| priorityDate | 2019-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 90.