| abstract |
The acid generator component (B) contains a mixed solvent (S) in which a base material component (A), an acid generator component (B), and an organic solvent (S1) represented by the following formula (s1) are mixed. Is a resist composition containing a compound (B1) represented by the following formula (b1). (In the formula, Rb1 is an aryl group. Rb2 and Rb3 are independently aliphatic hydrocarbon groups. Lb1, Lb2 and Lb3 are independently divalent linking groups or single bonds, respectively. X- is a counter anion. R1 and R2 are independently alkyl groups having 1 to 6 carbon atoms.) [Chemical formula 1] |