http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2020044872-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3411 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 |
| filingDate | 2019-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2020044872-A1 |
| titleOfInvention | Sputtering equipment and film formation method |
| abstract | Provided is a sputtering apparatus capable of obtaining a more uniform film thickness distribution over the entire surface of a thin film formed on a substrate. The magnet unit of the sputtering apparatus SM including the vacuum chamber 1 in which the substrate W and the target 3 are arranged to face each other, the plasma generating means for generating plasma in the vacuum chamber, and the magnet unit 4 arranged above the target is provided. Leakage that has multiple magnets with different polarities on the substrate side, and the line passing through the position where the vertical component of the magnetic field becomes zero in the space below the target located between the center of the target and its peripheral edge is closed endlessly. Along with applying a magnetic field locally, the magnet unit is divided into a plurality of portions 40a and 40b, each having a plurality of magnets 42a and 42b, on a virtual line from the center of the target to the peripheral portion thereof, and around the center of the target. Further provided are driving means 5 and 6 for rotationally driving each portion, and angular velocity control means 72 for controlling the angular velocity of each portion within a range in which the leakage magnetic field is maintained in an endless state. |
| priorityDate | 2018-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.