http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019187881-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2019-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2019187881-A1 |
| titleOfInvention | Negative photosensitive composition for EUV light, pattern forming method, manufacturing method of electronic device |
| abstract | The present invention provides a negative photosensitive composition for EUV light capable of forming a pattern in which the occurrence of missing defects is suppressed and the pattern collapse is suppressed. A method for forming a pattern and a method for manufacturing an electronic device are provided. The negative photosensitive composition for EUV light of the present invention contains a resin A having a repeating unit having an acid-degradable group in which a polar group is protected by a protecting group desorbed by the action of an acid, and a photoacid generator. The ClogP value of the resin after the protective group is removed from the resin A is 1.4 or less, the value x calculated by the formula (1) is 1.2 or more, and the value x is calculated by the formula (1). The value x and the value y calculated by the equation (2) satisfy the relationship of the equation (3). |
| priorityDate | 2018-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 218.