http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019167971-A1

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F7-021
filingDate 2019-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2021-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-WO2019167971-A1
titleOfInvention Alumina protective liquid, a protective method, and a method for manufacturing a semiconductor substrate having an alumina layer using the same.
abstract The present invention relates to an alumina protective liquid, a method for protecting alumina, and a method for manufacturing a semiconductor substrate having an alumina layer using the same. The alumina protective liquid of the present invention contains 0.0001 to 20% by mass of an alkaline earth metal compound, and the alkaline earth metal is one or more selected from the group consisting of beryllium, magnesium, strontium and barium. It is characterized by. INDUSTRIAL APPLICABILITY According to the present invention, it is possible to suppress corrosion of alumina in the manufacturing process of a semiconductor circuit.
priorityDate 2018-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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