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filingDate 2018-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2020-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-WO2019131351-A1
titleOfInvention Resist composition, resist film, pattern forming method, and method for manufacturing electronic devices
abstract A resist composition containing a resin (A), wherein the resin (A) is a resist composition containing a repeating unit having a specific structure and a repeating unit having an acid-degradable group, and the resist composition. Provided are a resist film to be formed, a pattern forming method using the resist composition, and a method for manufacturing an electronic device.
priorityDate 2017-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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