http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019131302-A1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-22 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-22 |
filingDate | 2018-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2020-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-WO2019131302-A1 |
titleOfInvention | Humidity sensor and its manufacturing method |
abstract | When the moisture-sensitive film contracts due to changes over time or environmental temperature after the formation of the moisture-sensitive film, the voids formed in the second electrode (upper electrode) are prevented from closing and the operation is stable for a long period of time. It is an object of the present invention to provide a humidity sensor having a structure to be used and a method for manufacturing the same. As a solution, the humidity sensor (1) includes a base material (2), a first electrode (3), a moisture-sensitive film (4) made of a polymer material, and a second electrode (5). Convex portions (41) are formed on the upper surface (4a) of the wet film (4) at predetermined intervals (W1), and the voids (G1) formed in the second electrode (5) are formed in the second electrode (5). The gap (G12) on the lower surface side of the second electrode is larger than the gap (G11) on the upper surface side of the second electrode. |
priorityDate | 2017-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.