http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019073718-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-18 |
| filingDate | 2018-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2019073718-A1 |
| titleOfInvention | Transmission filter and immersion exposure equipment |
| abstract | Provided are a transmission filter having excellent ultraviolet transparency, water repellency and scratch resistance, and an immersion exposure apparatus provided with the transmission filter. The transmission filter comprises a base material having a light transmittance of 65% or more at a wavelength of 315 nm and a water-repellent layer formed of a specific compound (a1), particles (a2) and a fluorine-containing copolymer (C). The surface of the water-repellent layer has convex portions and concave portions formed by particles (a2), the distance A between the apexes of adjacent convex portions, and the center and concave portions between the apexes of the adjacent convex portions. The B / A, which is the ratio of the light to the distance B, is larger than 0.50, the distance A is 315 nm or less, and the water contact angle of the water-repellent layer is 120 ° or more. |
| priorityDate | 2017-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 230.