http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019031360-A1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-02 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 |
filingDate | 2018-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2020-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-WO2019031360-A1 |
titleOfInvention | Replica mold material for imprint |
abstract | 【Task】 A new replica mold material for imprint is provided. [Solution] A replica mold material for imprint containing the following component (A), component (B) and component (C). (A): a di(meth)acrylate compound represented by the following formula (1): (In the formula, R 1 and R 2 each independently represent a hydrogen atom or a methyl group, R 3 and R 4 each independently represent an alkylene group, and R 5 and R 6 each independently represent a hydrogen atom or a methyl group. , And r 1 and r 2 each independently represent an integer.) (B): Non-crosslinkable copolymer having a structural unit represented by the following formula (2) and a structural unit represented by the following formula (3): (In the formula, R 7 and R 8 each independently represent a hydrogen atom or a methyl group, X 1 represents a chain alkyl group, and X 2 is an alicyclic group having an isobornyl structure, an adamantane structure, a tricyclodecane structure, or the like. Represents a hydrocarbon group.) (C): Photopolymerization initiator [Selection diagram] None |
priorityDate | 2017-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 344.