http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018225840-A1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J1-02 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-02 |
filingDate | 2018-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2020-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-WO2018225840-A1 |
titleOfInvention | Infrared sensor device, manufacturing method thereof, and infrared sensor device unit |
abstract | An infrared sensor device with high detection accuracy and a method for manufacturing the same are provided. The cap member 10 includes a peripheral wall portion 12 having an opening 11 and a facing wall portion 13 provided with an infrared ray transmitting portion 15, and partition walls 31 and 32 partition the internal space. The sensor-equipped substrate 20 and the cap member 10 are joined by the solder layer 30 so that the internal space is maintained in a vacuum state. The sensor-equipped substrate 20 includes an infrared detection sensor element 21 that receives the infrared IR transmitted through the infrared transmission part 15, a temperature sensor element 22 for temperature compensation, and a temperature compensation sensor element 23. Although the partition walls 31 and 32 prevent the infrared rays IR transmitted through the infrared transmitting unit 15 from hitting the sensor elements 22 and 23 for temperature compensation, the partition walls 31 and 32 have a lower end and an upper surface of the sensor-equipped substrate 20. The gap g between them allows the gas to flow, and the infrared detection sensor element 21 and the sensor elements 22 and 23 for temperature compensation can be placed under the same environment. |
priorityDate | 2017-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.