http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018123537-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G79-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-029 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F30-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2017-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2018123537-A1 |
| titleOfInvention | Radiation sensitive composition, pattern forming method, and metal oxide |
| abstract | An object of this invention is to provide the radiation sensitive composition excellent in a sensitivity. The present invention is a radiation-sensitive composition containing a metal oxide having a structural unit represented by the following formula (1) and a solvent. In the following formula (1), M is germanium, tin, or lead. R 1 is a monovalent organic group having 30 or less carbon atoms, which includes at least one of an unsaturated bond group and an electron withdrawing group, and is bonded to M with a carbon atom. The monovalent organic group represented by R 1 includes a group having an unsaturated bond, and the group having an unsaturated bond is at least one of an aromatic group and an ethylenic double bond-containing group. Good. The monovalent organic group represented by R 1 includes an electron withdrawing group, and the electron withdrawing group is a cyano group, a nitro group, a halogenated alkyl group, —COO—, or a cationic group. It is good to be at least one. The content of the metal oxide in terms of solid content is preferably 50% by mass or more. |
| priorityDate | 2016-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 67.