http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018105620-A1
Outgoing Links
Predicate | Object |
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classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-032 |
filingDate | 2017-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2019-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-WO2018105620-A1 |
titleOfInvention | PHOTOSENSITIVE RESIN COMPOSITION AND PHOTOSENSITIVE RESIN LAMINATE |
abstract | Disclosed is a photosensitive resin laminate that exhibits high resolution and good line width reproducibility even when focus is deviated at the time of exposure. A photosensitive resin laminate comprising a support film and a photosensitive resin composition layer containing a photosensitive resin composition formed on the support film, wherein a square having a side of 5 mm at any 10 locations of the support film The number of fine particles of not less than 1.5 μm and less than 4.5 μm contained in each small piece when cutting out the small piece is 0 to 200 on average at the 10 places. |
priorityDate | 2016-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 214.