| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-1071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-10794
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-03 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24 |
| filingDate |
2017-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2019-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-WO2018092448-A1 |
| titleOfInvention |
Method for stabilizing chlorosilane polymer |
| abstract |
Allowing the chlorosilane polymer to be easily stabilized without producing a solid chlorosilane polymer. A method for stabilizing a chlorosilane polymer generated secondarily in a chemical vapor deposition process using a chlorosilane-based gas, which comprises contacting the chlorosilane polymer with an alcohol and decomposing it into an alkoxide, hydrogen chloride and hydrogen to obtain an alcohol It includes a step of diluting in (S11) and a step of hydrolyzing an alkoxide (S12). |
| priorityDate |
2016-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |