http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018034179-A1

Outgoing Links

Predicate Object
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-02
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42
filingDate 2017-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2019-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-WO2018034179-A1
titleOfInvention Gas barrier film, method for producing the same, and electronic device provided with the same
abstract The object of the present invention is to provide a gas barrier film having an improved gas barrier property per unit thickness than a gas barrier film when a silicon compound is used, a method for producing the same, and an electronic device provided with the same. It is. The gas barrier film of the present invention is a gas barrier film containing silicon (Si) and the element M of group 5 of the long period periodic table, and the gas barrier film has a Si-M bond. It is characterized by having.
priorityDate 2016-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0470330-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005035128-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013226757-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010247369-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID140772
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123105
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407155265
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414886711
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20186
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419575326
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5416
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23936
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415844527
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6326
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559546
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7368
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577789
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8097
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414857746
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458431896
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID142154
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24857
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419569951
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23990
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530175
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4602
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577475
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862862

Total number of triples: 46.