| abstract |
The SiC heater includes a heating element having a thin plate-like silicon carbide sintered body and an insulating film formed on the surface of the silicon carbide sintered body, a pair of electrodes for energizing the heating element, and the heat generation. And a heater base for holding the heating element from one side while insulating heat from the body, wherein the insulating film is located on the side of the sintered body of silicon carbide opposite to the heater base at room temperature. Specific resistance of at least 10 9 Ω · cm, thermal expansion coefficient of 2 × 10 −6 / K or more and 6 × 10 −6 / K or less, SiO 2 as a matrix, and at least one of B 2 O 3 and Al 2 O 3 The first additive component is contained in an amount of 1% by weight to 35% by weight, and the second additive component containing at least one of MgO and CaO is contained in an amount of 1% by weight to 35% by weight. |