http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017145635-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J65-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J65-00 |
| filingDate | 2017-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2017145635-A1 |
| titleOfInvention | Light irradiation apparatus and light irradiation method |
| abstract | Provided is a light irradiation apparatus capable of suppressing lamp contamination caused by a sublimate generated during light irradiation. The light irradiation device includes a lamp (101) that irradiates light to the object to be processed (200), a first gas injection unit (110) that injects the gas directly to the lamp (101), and an object to be processed ( 200) and a second gas injection unit (120) that injects gas in the direction of direct injection of gas, and the first gas injection unit (110) and the second gas injection unit (120) of the lamp (101) A line connecting the center and the object to be processed (200) with the shortest distance is used as a reference line, and the reference line is divided into a first side and a second side that are symmetrical with respect to the first side or the second side. Both are installed on either side, and the second gas injection unit (120) is a parallel line (second parallel) drawn in parallel to the reference line from the gas injection port of the second gas injection unit (120) toward the object to be processed. Line) and the extension line at the center of the gas injection direction of the second gas injection unit (120) is 0 degree. Beyond it is installed so as to be 90 degrees or less. |
| priorityDate | 2016-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 181.