http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017018084-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2016-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2017018084-A1 |
| titleOfInvention | Actinic ray-sensitive or radiation-sensitive composition, and actinic ray-sensitive or radiation-sensitive composition film using this composition |
| abstract | An object of the present invention is to provide an actinic ray-sensitive or radiation-sensitive composition that is excellent in thermal stability, and that can achieve high sensitivity and good roughness characteristics. The actinic ray-sensitive or radiation-sensitive composition according to the present invention comprises (A) an organic-inorganic composite composition containing a metal or metalloid element, wherein the metal or metalloid element has an aggregate domain size of 1 to 5 nm, Alternatively, a compound characterized in that a carboxylic acid or / and a carboxylic acid derivative, which is 1.2 to 2.0 mole times the metalloid element, form a coordination structure, and (B) an actinic ray or radiation It contains a compound (Q) that generates an acid upon irradiation and an organic solvent (C). |
| priorityDate | 2015-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 318.