| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2307-732
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2307-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2305-22 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B5-245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B5-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-36 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate |
2016-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2017-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-WO2017013935-A1 |
| titleOfInvention |
Polishing pad and polishing method |
| abstract |
Provided is a polishing pad capable of sufficiently polishing the vicinity of a convex portion and the inner surface of a concave portion of the surface of the polishing target in polishing a polishing target having at least one of a convex portion and a concave portion on the surface. The polishing pad has a raised portion (1) in which a plurality of fibers (12) having a length of 2 mm or more are raised on the surface of the base portion (11), and the mass of the fibers (12) is 250 g / m 2 or more. This polishing pad is used for polishing a polishing object (2) containing a metal, an alloy, or a metal oxide material and having at least one of a convex portion (21) and a concave portion (22) on the surface. |
| priorityDate |
2015-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |