http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016199271-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-30416 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-221 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24507 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-063 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28 |
| filingDate | 2015-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2016199271-A1 |
| titleOfInvention | Charged particle beam device and control method of charged particle beam device |
| abstract | The charged particle beam device (1) of the present invention includes a stage drive unit (14) for driving a stage (13), a detector (16) for detecting charged particles emitted from a sample (SAMP), and the detector. A first image transfer unit (20) for transferring a signal from the detector using a first image transfer protocol, and a second image transfer unit (21) for transferring a signal from the detector using a second image transfer protocol. And a switching unit (23) for switching between the first image transfer unit and the second image transfer unit based on the state of the stage. The first image transfer protocol is more reliable than the second image transfer protocol, and the second image transfer protocol has a higher transfer speed than the first image transfer protocol. By switching and using a plurality of image transfer units according to the state of the stage, the followability to the stage movement and the fault tolerance of communication are improved. |
| priorityDate | 2015-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7156993 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426135032 |
Total number of triples: 22.