http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016153052-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-84 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-84 |
| filingDate | 2016-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2016153052-A1 |
| titleOfInvention | Photomask manufacturing method and inspection apparatus |
| abstract | The method for manufacturing the photomask (10) includes an intermediate inspection step for inspecting the foreign matter on the photomask (18) being manufactured before the final step among the steps for manufacturing the photomask. |
| priorityDate | 2015-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.