| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-656
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-6261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-083 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-495 |
| filingDate |
2015-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2017-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-WO2016056352-A1 |
| titleOfInvention |
Niobium oxide sintered body, sputtering target comprising the sintered body, and method for producing niobium oxide sintered body |
| abstract |
SUMMARY OF THE INVENTION The present invention provides a sintered niobium oxide characterized by having a composition of NbO x (2 <x <2.5). A niobium oxide sintered body applicable to a sputtering target for forming a high-quality variable resistance layer for ReRAM is provided. In particular, an object is to provide a high-density sintered niobium oxide suitable for stabilization of sputtering. [Selection] Figure 1 |
| priorityDate |
2014-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |