http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016006592-A1

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filingDate 2015-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2017-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-WO2016006592-A1
titleOfInvention Step-and-repeat imprint mold and manufacturing method thereof
abstract Provided is an imprint mold for step-and-repeat capable of suppressing deformation of an end portion of an uneven pattern formed on a cured resin layer when removing the mold. According to the present invention, between the transparent base material 4, the transparent resin layer 6 having the pattern region 13 formed thereon and the uneven pattern 3 formed thereon, and between the transparent base material and the transparent resin layer, A step-and-repeat imprint mold 2 is provided, which includes a light shielding member 5 provided so as to overlap the pattern region in a part of the pattern region.
priorityDate 2014-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010253753-A
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Total number of triples: 31.