http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015190478-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J201-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J201-00 |
| filingDate | 2015-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2015190478-A1 |
| titleOfInvention | Laminated body for temporary bonding, manufacturing method of laminated body for temporary bonding, and laminated body with device wafer |
| abstract | A laminate for temporary bonding that has good flatness on the bonding surface between the device wafer and the support, can stably temporarily bond the device wafer and the support, and can easily release the temporary bonding between the device wafer and the support. The manufacturing method of the laminated body for temporary attachment and the laminated body with a device wafer are provided. This temporary adhesive laminate includes polystyrene elastomer, polyester elastomer, polyolefin elastomer, polyurethane elastomer, polyamide elastomer, polyacryl elastomer, silicone elastomer, polyimide elastomer, polyetheretherketone, polyphenylene sulfide, A film containing at least one selected from polyphenylene ether and polyethersulfone, and a release layer containing a release agent containing at least one selected from fluorine atoms and silicon atoms are provided on at least one surface of the film. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110289383-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110289383-B |
| priorityDate | 2014-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 392.