http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015080061-A1
Outgoing Links
Predicate | Object |
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classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2255-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2255-10 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D127-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F16-26 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D127-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F16-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-02 |
filingDate | 2014-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2017-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-WO2015080061-A1 |
titleOfInvention | Coating composition and method for producing photoresist laminate |
abstract | Provided is a coating composition capable of forming a film having excellent followability to a step during coating, a low refractive index in a short wavelength band, and excellent solubility in an alkaline aqueous solution. -[CX 1 X 2 -CY (-Rf-COOM)]-and a fluorine-containing polymer (A) having a number average molecular weight of 1,000 to 7,500 and a solvent. A coating composition. X 1 and X 2 each independently represent a hydrogen atom, a fluorine atom or a chlorine atom, Y represents a hydrogen atom, a fluorine atom, a chlorine atom, a methyl group or a trifluoromethyl group, and Rf represents a carbon-carbon atom. Represents a branched perfluoroalkylene group which may contain an etheric oxygen atom, or a branched oxyperfluoroalkylene group which may contain an etheric oxygen atom between carbon-carbon atoms, and M is a hydrogen atom or substituted The ammonium ion which may be sufficient is shown. |
priorityDate | 2013-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 60.