http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015019706-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2014-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2015019706-A1 |
| titleOfInvention | Polished polishing object manufacturing method and polishing composition kit |
| abstract | The present invention provides a method for producing a polished polishing object capable of remarkably reducing the haze level of the surface of the polishing object and significantly reducing defects. An object to be polished is double-side polished using a double-side polishing composition comprising first abrasive grains having an average primary particle size of 40 nm or more and a nitrogen-containing water-soluble polymer, and the double-side polished target is polished. Single-side polishing of the double-side polished object to be polished using a single-side polishing composition containing a second abrasive having an average primary particle size of 40 nm or less and a water-soluble polymer A ratio (A) / (B) of the average primary particle diameter (B) of the second abrasive grains to the average primary particle diameter (A) of the first abrasive grains exceeds 1. The method for producing a polished object to be polished is 2.5 or less. [Selection figure] None |
| priorityDate | 2013-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 103.