http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015012257-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E60-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D5-0057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4482 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B35-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2014-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2015012257-A1 |
| titleOfInvention | Continuous distillation type trichlorosilane vaporization supply device and continuous distillation type trichlorosilane gas vaporization method |
| abstract | A trichlorosilane vaporization supply device used in the semiconductor industry and the like is provided. The trichlorosilane vaporization and supply apparatus of the present invention includes an introduction port 3 for hydrogen gas serving as a carrier gas, an evaporator 1 having a heating means 16 for evaporating liquid trichlorosilane, and a vapor pressure of the evaporated trichlorosilane gas. Continuous distillation type trichlorosilane vaporizing and supplying apparatus comprising a condenser 2 having a cooling means 20 for condensing at a temperature corresponding to a lower saturated vapor pressure, and a precision temperature control mechanism and a precision pressure adjustment mechanism 5 of the condenser. The center line of the evaporator and the center line of the condenser are not on the same line, and the lower end of the condenser communicates with the lower end of the evaporator through the tubes 13 and 14. In the control, the total flow rate of the trichlorosilane / hydrogen mixed gas whose concentration is adjusted and the temperature of the liquid trichlorosilane 17 in the evaporator are proportionally linked. |
| priorityDate | 2013-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.