http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2014192266-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 |
| filingDate | 2014-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2014192266-A1 |
| titleOfInvention | Etching composition |
| abstract | An etching composition comprising an anion having a structure in which a fluorine atom and a phosphorus atom are bonded by a single bond, a salt composed of a cation, and a solvent. |
| priorityDate | 2013-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 258.