| abstract |
This invention is a radiation sensitive resin composition containing the polymer which has a structural unit containing an acid dissociable group, and the compound represented by following formula (1). In the following formula (1), R 1 is a monovalent organic group having 1 to 30 carbon atoms. L is a single bond, an oxygen atom or a sulfur atom. M + is a monovalent radiolytic onium cation. In Formula (1), the monovalent organic group of R 1 is preferably a monovalent hydrocarbon group or a monovalent fluorinated hydrocarbon group, and L is preferably a single bond. In formula (1), the monovalent organic group of R 1 is a monovalent hydrocarbon group, a monovalent fluorinated hydrocarbon group, a monovalent aliphatic heterocyclic group or a monovalent fluorinated aliphatic heterocyclic group. And L is preferably an oxygen atom or a sulfur atom. The M + monovalent radiolytic onium cation is preferably represented by the following formula (X). It is preferable to further contain a radiation sensitive acid generator. |