http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2014125953-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K2102-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2439-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2307-7242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-8445 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2457-20 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-04 |
| filingDate | 2014-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2014125953-A1 |
| titleOfInvention | Method for producing gas barrier film and electronic device including gas barrier film |
| abstract | When a gas barrier film is used as a material for an electronic device, a method for producing a gas barrier film capable of providing the electronic device with sufficient bending resistance while maintaining a high gas barrier property is provided. In the vacuum chamber of the film forming apparatus, discharge plasma while supplying the film forming gas to the film forming space S between the pair of film forming rolls while transporting the substrate wound around the pair of film forming rolls opposed to each other. The gas barrier film is produced by laminating a gas barrier film on a substrate to produce a gas barrier film, the step of forming an nth gas barrier film (n is a natural number) on the substrate, forming a (n + 1) th gas barrier film on the n gas barrier film, and including 1 combination of gas barrier films in which the film thickness difference index ID shown by the following formula 1 falls within the range of 2% or more and less than 20% Have one or more. [Selection] Figure 2 |
| priorityDate | 2013-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 54.