http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2014112418-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2014-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2014112418-A1 |
| titleOfInvention | Polishing liquid for metal and polishing method |
| abstract | A metal polishing liquid for polishing at least part of a metal, comprising (A) an amino acid, (B) 1-hydroxybenzotriazole, and (C) a compound having a benzotriazole skeleton (provided that 1-hydroxybenzo (Excluding triazole), (D) (meth) acrylic acid-derived structural unit, (meth) acrylate-derived structural unit, (meth) acrylamide-derived structural unit, and amino (meth) acrylamide-derived structural unit A polymer having at least one selected from the group consisting of: a component (D) having a weight average molecular weight of 10,000 or more, a component (B) content with respect to the component (D) content, and (C ) A metal polishing slurry having a total mass ratio of component contents of 0.15 to 3.00 and a pH of 3.0 to 6.0. |
| priorityDate | 2013-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 136.