http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2014109186-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2367-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-0008 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D167-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G63-065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G59-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G63-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2013-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2014109186-A1 |
| titleOfInvention | Resist underlayer film forming composition |
| abstract | A resist underlayer film forming composition having excellent solubility in a solvent mainly composed of propylene glycol monomethyl ether is provided. A polymer having a structural unit represented by the following formula (1a) or (1c) and a structural unit represented by the following formula (1b) and propylene glycol monomethyl ether in excess of 50% by mass A resist underlayer film-forming composition comprising a solvent and an organic solvent, wherein the structural unit represented by the formula (1a) or the formula (1c) and the structural unit represented by the formula (1b) are alternately arranged. (In the formulas (1a) and (1b), Q represents a phenylene group or a naphthylene group, m represents 1 or 2, and n independently represents 0 or 1). None |
| priorityDate | 2013-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 141.