http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2014097963-A1
Outgoing Links
Predicate | Object |
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classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-548 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F2203-04103 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-541 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1884 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-022483 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F3-041 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B5-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0224 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0749 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-453 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-075 |
filingDate | 2013-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2017-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-WO2014097963-A1 |
titleOfInvention | Zinc oxide transparent conductive film |
abstract | A zinc oxide-based transparent conductive film containing zinc atoms, oxygen atoms, and M defined below, wherein the number of zinc atoms, the number of oxygen atoms, and titanium with respect to the total number of atoms constituting the film The total number of atoms, gallium atoms, and aluminum atoms is 99% or more, and the total number of zinc atoms, titanium atoms, gallium atoms, and aluminum atoms contained in the film is titanium. Ratio of total number of atoms, number of gallium atoms and number of aluminum atoms ((titanium atom number + gallium atom number + aluminum atom number) / (zinc atom number + titanium atom number + gallium atom number + aluminum atom number) × 100 1.3% or more and 2.0% or less, and the number of titanium atoms is at least 50% with respect to the total number of titanium atoms, gallium atoms and aluminum atoms contained in the film. Ri, and the carrier electron concentration 3.60 × 10 20 cm -3 or less, the mobility is at 43.0cm 2 / Vs or more, and the specific resistance is not more than 5.00 × 10 -4 Ω · cm oxide Zinc based transparent conductive film. M: Titanium atom, titanium atom and gallium atom, titanium atom and aluminum atom, or titanium atom, gallium atom and aluminum atom |
priorityDate | 2012-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 67.