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filingDate 2013-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2017-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-WO2014097963-A1
titleOfInvention Zinc oxide transparent conductive film
abstract A zinc oxide-based transparent conductive film containing zinc atoms, oxygen atoms, and M defined below, wherein the number of zinc atoms, the number of oxygen atoms, and titanium with respect to the total number of atoms constituting the film The total number of atoms, gallium atoms, and aluminum atoms is 99% or more, and the total number of zinc atoms, titanium atoms, gallium atoms, and aluminum atoms contained in the film is titanium. Ratio of total number of atoms, number of gallium atoms and number of aluminum atoms ((titanium atom number + gallium atom number + aluminum atom number) / (zinc atom number + titanium atom number + gallium atom number + aluminum atom number) × 100 1.3% or more and 2.0% or less, and the number of titanium atoms is at least 50% with respect to the total number of titanium atoms, gallium atoms and aluminum atoms contained in the film. Ri, and the carrier electron concentration 3.60 × 10 20 cm -3 or less, the mobility is at 43.0cm 2 / Vs or more, and the specific resistance is not more than 5.00 × 10 -4 Ω · cm oxide Zinc based transparent conductive film. M: Titanium atom, titanium atom and gallium atom, titanium atom and aluminum atom, or titanium atom, gallium atom and aluminum atom
priorityDate 2012-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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