http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2014057860-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3281 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-261 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-0075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31133 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-08 |
| filingDate | 2013-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2014057860-A1 |
| titleOfInvention | Substrate cleaning method and cleaning liquid composition |
| abstract | In the method for cleaning a substrate of the present invention, the surface of the substrate is 1 to 20% by mass of a tetraalkylammonium hydroxide having 1 to 4 carbon atoms in an alkyl group and 1 to 5 carbon atoms in the total mass of the cleaning liquid composition. And 20 to 98% by mass of an alcohol, and 1 to 79% by mass of N-methylpyrrolidone. By this cleaning method, the cured product of polyorganosiloxane adhering to the substrate surface can be effectively removed without damaging, corroding or contaminating the substrate, and the substrate can be regenerated. |
| priorityDate | 2012-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 49.