http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013161735-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02554 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1275 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1291 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02628 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G25-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G19-00 |
| filingDate | 2013-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2013161735-A1 |
| titleOfInvention | COMPOSITION FOR PRODUCING COMPOSITE OXIDE THIN FILM, METHOD FOR PRODUCING THIN FILM USING THE COMPOSITION, AND COMPOSITE OXIDE THIN FILM |
| abstract | The present invention relates to a composition capable of forming a composite oxide thin film applicable to an oxide semiconductor film or the like by a spray pyrolysis method or the like, and a method of forming a composite oxide thin film using the composition I will provide a. The present invention relates to at least one compound selected from the group consisting of a compound containing a zinc element and a compound containing a group 3B element, a partial hydrolyzate of the compound with water or the compound and the partial hydrolyzate, and a group 4A. At least one compound selected from the group consisting of a compound containing an element and a compound containing a group 4B element, a partial hydrolyzate of the compound with water, or a composition for producing a complex oxide containing the compound and the partial hydrolyzate Related to things. The present invention comprises applying the composition to a substrate surface under an inert gas atmosphere, and then performing an operation of heating the obtained coating film at least once. The present invention relates to a method for producing a complex oxide thin film having an average transmittance. |
| priorityDate | 2012-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 296.