abstract |
The release film for producing a green sheet of the present invention has a substrate and a release agent layer provided on the first surface side of the substrate, and the release agent layer comprises a (meth) acryloyl group, an alkenyl group, and An ultraviolet curable compound (A) containing three or more reactive functional groups selected from maleimide groups in one molecule, a polyorganosiloxane (B), and an α-aminoalkylphenone photopolymerization initiator (C ), The average thickness is 0.3 to 2 μm, the arithmetic average roughness Ra 1 of the outer surface is 8 nm or less, the maximum protrusion height Rp 1 is 50 nm or less, and the second surface of the substrate is The arithmetic average roughness Ra 2 is 5 to 40 nm, and the maximum protrusion height Rp 2 is 60 to 500 nm. According to the present invention, it is possible to suppress occurrence of pinholes and partial thickness variations in the green sheet. |