http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013146090-A1

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filingDate 2013-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2015-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-WO2013146090-A1
titleOfInvention Manufacturing method of glass substrate for magnetic disk
abstract When producing a glass substrate for magnetic disk by polishing using zirconia abrasive grains as free abrasive grains, there is a method for producing a glass substrate for magnetic disk that is less prone to problems such as head crash failure and thermal asperity failure. Provided. In this manufacturing method, a polishing pad attached to a polishing surface plate in a state where a donut-shaped glass substrate having at least a pair of main surfaces and two side wall surfaces constituting an inner hole and an outer shape is held by a carrier. A method of manufacturing a glass substrate for a magnetic disk, comprising a polishing step of polishing the glass substrate by planetary gear movement of the carrier while sandwiching the pair of main surfaces and supplying a polishing liquid to the pair of main surfaces. The polishing liquid contains zirconia particles produced by a wet method as abrasive grains.
priorityDate 2012-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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