http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013122123-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F11-143 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F11-147 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2221-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2103-12 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-007 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F11-143 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F11-147 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B57-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K23-52 |
| filingDate | 2013-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2013122123-A1 |
| titleOfInvention | Abrasive recycling method |
| abstract | An object of the present invention is to provide a polishing material recycling method capable of recovering a polishing material from a used polishing material by an efficient method and then obtaining a high-purity recycled polishing material by a simple method. . The abrasive material regeneration method of the present invention is an abrasive material regeneration method for regenerating an abrasive material from a used abrasive slurry, and the abrasive comprises diamond, boron nitride, silicon carbide, alumina, alumina zirconia, zirconium oxide and A slurry recovery step A for recovering the abrasive slurry discharged from the polishing machine, which is at least one selected from cerium oxide, and adding an alkaline earth metal salt as an inorganic salt to the recovered abrasive slurry. Through the separation and concentration process B for agglomerating and separating and concentrating the abrasive from the mother liquor, the abrasive collecting process C for recovering the separated and concentrated abrasive and the second concentration process D for filtering the concentrated abrasive It is characterized by recycling the abrasive. |
| priorityDate | 2012-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.