http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013094399-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2101-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2103-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2103-346 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-5236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K23-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-007 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B57-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K23-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F11-14 |
| filingDate | 2012-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2013094399-A1 |
| titleOfInvention | Abrasive recycling method and recycled abrasive |
| abstract | SUMMARY OF THE INVENTION An object of the present invention is to recover and recycle an abrasive that can recover cerium oxide from a used abrasive containing cerium oxide as a main component by an efficient method and then obtain a recycled abrasive by a simple method. It is to provide an abrasive. The abrasive material regeneration method of the present invention is an abrasive material regeneration method for regenerating a cerium oxide abrasive material from a used abrasive slurry containing a cerium oxide abrasive material obtained by polishing an object whose main component is silicon. Then, a slurry recovery step A for recovering the abrasive slurry discharged from the polishing machine, and a magnesium salt as an inorganic salt are added to the recovered abrasive slurry, and the pH value of the mother liquor in terms of 25 ° C. is 6.5 or more Separation and concentration step B for aggregating the abrasive under conditions of less than 10.0, separating the abrasive from the mother liquor and concentrating, and abrasive recovery step C for recovering the separated and concentrated abrasive Then, the abrasive containing cerium oxide is regenerated. |
| priorityDate | 2011-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 53.