http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013054883-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-2003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02527 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2012-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2013054883-A1 |
| titleOfInvention | Abrasive slurry and polishing method |
| abstract | The present invention provides an abrasive slurry capable of polishing high hardness materials such as silicon carbide and gallium nitride at a high polishing rate. The present invention is an abrasive slurry for polishing a high-hardness material having a Mohs hardness of 8 or more, comprising a slurry containing manganese oxide particles and manganate ions. In the present invention, the manganese oxide particles in the slurry are preferably 1.0% by mass or more, the manganese oxide is preferably manganese dioxide, and the manganate ion is preferably a permanganate ion. According to the abrasive slurry of the present invention, it is possible to perform smooth polishing at a high speed even on hard-to-cut materials such as silicon carbide and gallium nitride. |
| priorityDate | 2011-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.